Synthesis and optimization of low-pressure chemical vapor deposition-silicon nitride coatings deposited from SiHCl3 and NH3
Cossou, Benjamin, Sylvain Jacques, Guillaume Cou\ egnat, Sean W King, Liyi Li, William A Lanford, Gyanendra Bhattarai, Michelle Paquette, and Georges Chollon. 2019. “Synthesis and Optimization of Low-Pressure Chemical Vapor Deposition-Silicon Nitride Coatings Deposited from SiHCl3 and NH3”. Thin Solid Films 681: 47-57.