Amorphous hydrogenated boron carbide low-k dielectric and method of making the same, US patent no. 10,301,719 B1 | paquettem

Paquette, M.; Nordell, B.; Caruso, A. N.; King, S. Amorphous hydrogenated boron carbide low-k dielectric and method of making the same, US patent no. 10,301,719 B1, 2019.

Last updated on 11/01/2023