Conquering the Low-k Death Curve: Insulating Boron Carbide Dielectrics with Superior Mechanical Properties

Nordell, B. J.; Nguyen, T. D.; Keck, C. L.; Dhungana, S.; Caruso, A. N.; Lanford, W. A.; Gaskins, J. T.; Hopkins, P. E.; Merrill, D. R.; Johnson, D. C.; Ross, L. L.; Henry, P.; King, S. W.; Paquette, M. M. Conquering the Low-k Death Curve: Insulating Boron Carbide Dielectrics with Superior Mechanical Properties. Advanced Electronic Materials 2016, 2 (7), 1600073.