Nordell, B. J.; Nguyen, T. D.; Caruso, A. N.; Purohit, S. S.; Oyler, N. A.; Lanford, W. A.; Gidley, D. W.; Gaskins, J. T.; Hopkins, P. E.; Henry, P.; King, S. W.; Paquette, M. M. Carbon-Enriched Amorphous Hydrogenated Boron Carbide Films for Very-Low-K Interlayer Dielectrics. Advanced Electronic Materials 2017, 3 (12), 1700116.