Nordell, B. J.; Nguyen, T. D.; Keck, C. L.; Dhungana, S.; Caruso, A. N.; Lanford, W. A.; Gaskins, J. T.; Hopkins, P. E.; Merrill, D. R.; Johnson, D. C.; Ross, L. L.; Henry, P.; King, S. W.; Paquette, M. M. Conquering the Low-K Death Curve: Insulating Boron Carbide Dielectrics With Superior Mechanical Properties. Advanced Electronic Materials 2016, 2 (7), 1600073.
Publications by Year: 2016
2016
Dhungana, S.; Nordell, B. J.; Caruso, A. N.; Paquette, M. M.; Lanford, W. A.; Scharfenberger, K.; Jacob, D.; King, S. W. Combinatorial Survey of Fluorinated Plasma Etching in the Silicon-Oxygen-Carbon-Nitrogen-Hydrogen System. Journal of Vacuum Science & Technology A 2016, 34 (6), 061302.
Lanford, W.; Parenti, M.; Nordell, B.; Paquette, M.; Caruso, A.; Mäntymäki, M.; Hämäläinen, J.; Ritala, M.; Klepper, K.; Miikkulainen, V.; Nilsen, O.; Tenhaeff, W.; Dudney, N.; Koh, D.; Banerjee, S. K.; Mays, E.; Bielefeld, J.; King, S. W. Nuclear Reaction Analysis for H, Li, Be, B, C, N, O and F With an RBS Check. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2016, 371, 211-215.
Nordell, B. J.; Keck, C. L.; Nguyen, T. D.; Caruso, A.; Purohit, S. S.; Lanford, W. A.; Dutta, D.; Gidley, D.; Henry, P.; King, S. W.; Paquette, M. M. Tuning the Properties of a Complex Disordered Material: Full Factorial Investigation of PECVD-Grown Amorphous Hydrogenated Boron Carbide. Materials Chemistry and Physics 2016, 173, 268-284.