Nanoscale Structure-Property Relationship in Amorphous Hydrogenated Boron Carbide for Low-k Dielectric Applications

Im, S.; Paquette, M. M.; Belhadj-Larbi, M.; Rulis, P.; Sakidja, R.; Hwang, J. Nanoscale Structure-Property Relationship in Amorphous Hydrogenated Boron Carbide for Low-K Dielectric Applications. Microscopy and Microanalysis 2017, 23 (S1), 1486-1487.