A Selectively Colorful yet Chilly Perspective on the Highs and Lows of Dielectric Materials for CMOS Nanoelectronics

King, S. W.; Plombon, J.; Bielefeld, J.; Blackwell, J.; Vyas, S.; Chebiam, R.; Naylor, C.; Michalak, D.; Kobrinsky, M.; Gstrein, F.; Metz, M.; Clarke, J.; Thapa, R.; Paquette, M. M.; Vemuri, V.; Strandwitz, N.; Fan, Y.; Orlowski, M. A Selectively Colorful yet Chilly Perspective on the Highs and Lows of Dielectric Materials for CMOS Nanoelectronics. 2020 IEEE International Electron Devices Meeting (IEDM) 2020, 40.1.1-40.1.4.
Last updated on 11/01/2023